Program details
English
Language of Instruction
Oct
Available Intake(s)
Every day we use products that are smaller, smarter, more powerful and always connected. The hidden heroes behind these breakthroughs are microsystems – tiny, high‑performance devices that are now indispensable in automotive, medical, communications, energy and many more sectors. At the Department of Microsystems Engineering (IMTEK) you can become the engineer who designs them. Why choose a career in Microsystem Engineering? Universal demand: Companies across all industries are hunting for microsystems experts. Cutting‑edge tech: Work with clean‑room facilities, wafer‑fab equipment and the latest MEMS/CMOS platforms. Broad expertise: Choose a specialisation that fits your passion – Circuits & Systems, Biomedical Engineering, Materials & Fabrication, or Photonics. World‑class research hub: Study at one of the largest, internationally recognised microsystems centres. Personalised mentorship: 220 students : 22 professors → This is an ideal student‑to‑faculty ratio. Hands‑on experience: State‑of‑the‑art clean‑room & labs from day one Industry‑ready thesis: Conduct real research in a professor’s group, using IMTEK’s cutting‑edge infrastructure.
A GCQ360 counsellor can help you with eligibility, documents, and your application timeline.
The Master’s programme in Microsystems Engineering is built around a rigorous first year that establishes a solid theoretical foundation across all core disciplines. After completing this intensive core stage, students can tailor their studies through a wide selection of advanced electives and a dedicated concentration, culminating in a research‑driven Master’s thesis performed in one of our cutting‑edge labs. Core modules (mandatory – five courses) Microelectronics Micromechanics Microsystems Design Lab MSE Technology & Processes Signal Processing Choose five out of eight advanced electives Assembly & Packaging Technology Micro‑optics Modelling & System Identification Probability & Statistics Sensors Biomedical Microsystems Micro‑actuators Microfluidics Tailor Your Path (Semesters two to four) Choose one concentration area and gain access to a full suite of specialised lectures and hands‑on lab courses tailored to that field. This flexible structure lets you dive deep into the topics that matter most to your career goals. Circuits & Systems Biomedical Engineering Materials & Fabrication Photonics | International guest lecturers Specialist literature in other languages Training in intercultural skills Projects with partners in Germany and abroad Language training provided | Internships are not mandatory in the curriculum, but students are free to take a leave of absence to complete a placement at a company. | German language courses: Yes | English language courses: No
As of Sep 7, 2026, verify on the university’s site.
The following is valid for applicants from: EU countries For the winter semester: 1 March - 15 July The following is valid for applicants from: non-EU countries For the winter semester: 1 March - 31 May | Please find more details on this website.
Please check this website.
No minimum language level required
Looking for living expenses, accommodation, scholarships, placements, or campus facilities? See the university page.
190 EUR per semester: Administrative fee: 80 EUR Contribution to the constituted student body: 7 EUR Contribution to the student union: 103 EUR
Yes | Students who earned an excellent undergraduate record (a final grade of 1.5 or better on the German grading scale) are eligible to apply for the Deutschlandstipendium. https://uni-freiburg.de/en/studies/during-your-studies/financing-your-studies/deutschlandstipendium/
As Freiburg is an attractive city, finding a suitable and affordable place to live can take a little while. The University of Freiburg offers all newly enrolled international students the possibility to apply for student housing via the International Office. In addition to these dormitories, which are run by the Studierendenwerk Freiburg (www.swfr.de/en), several independent residence halls are listed on the university website (https://uni-freiburg.de/internationaloffice/housing/). The Studierendenwerk Freiburg and the International Office also offer a list of available private rooms.
Participants must ensure that sufficient funding is available to finance their participation in a course of study. The average cost of living in Freiburg for one month is currently approx. 850 EUR to 1,000 EUR. Some details: Rooms in private accommodation, including extra costs: 350 EUR – 700 EUR Rooms in student residences, including extra costs: 250 EUR – 550 EUR Private expenses amount to around 350 EUR per month. Health insurance is available for approx. 120 EUR per month. Transport: A special student ticket for regional transport costs approx. 96 EUR per semester.
No minimum language level required
The following tuition fees apply for applicants from: non-EU countries 1,500 EUR
Please find details on the course website.
Please find more details on this website.
Yes
Qualified students can secure research or teaching assistant positions within the Department of Microsystems Engineering (IMTEK) as well as at the many research institutes located in Freiburg.
The University of Freiburg offers a range of information and advisory services to enable its students with disabilities/chronic illnesses to participate in student life as equally and independently as possible and to support them in completing their studies. We are happy to advise you on support options during your studies, provide a listening ear, or mediate in the event of a conflict.
The Studierendenwerk supports you in various ways during your studies with a child. We run our own daycare centres, offer family apartments in our residence halls, provide different counselling services, and our cafeterias have special children’s meals. You can find more information and the relevant contact persons: https://www.swfr.de/en/support/social-counselling/studying-with-a-child.
Welcome event Buddy programme Tutors Accompanying programme Specialist counselling Cultural and linguistic preparation
The university offers the following career services: Company visits – on‑site tours and presentations at partner firms Employer talks & panels – direct conversations with recruiters and industry experts Application advice – personalised help with CVs, cover letters, and interview preparation
Because a large proportion of our student body comes from abroad, we make it a priority that every international student feels welcomed and well prepared for life in Germany. Pre arrival: Detailed checklists covering visas, health insurance, banking and travel arrangements Extensive guidelines on housing options, public transport, and everyday life in Freiburg Arrival & orientation week A comprehensive welcome week that includes information sessions on academic regulations and student services, campus tour to familiarise students with lecture halls, libraries and labs, social events organised by the Student Council Ongoing support Advice concerning visa extensions and residence permits, access to language courses and intercultural training, assistance with finding part time work, internships, and scholarship opportunities
This university has not published its own document list, so this is what a student going to Germany is generally asked for. Confirm the exact list with the university.
Bucerius Law School
Funding
Merit- and need-based awards toward the EUR 25,000 tuition fee
Applicants to the Master of Law and Business (LLM/MLB) programme; early-bird and scholarship deadline is January 15 for the September intake
National Merit Foundation
Funding
Full tuition waiver
For students admitted to an accredited university program, based on financial need and merit.
Il servizio di scambio accademico tedesco (DAAD)
Funding
EUR Research Stays, Scholarships, and Master's Programs
Students from pontifical universities.
Master of Science in Microsystems Engineering is a Master program in Microsystems Technology offered by University of Freiburg in Freiburg im Breisgau, Germany.
Tuition fees for this program can vary by intake and are best confirmed with a GCQ360 counsellor.
Minimum qualification required: We welcome graduates who have built a solid foundation in the core sciences and engineering fundamentals. Ideal candidates hold a Bachelor’s degree in: Mechatronics Mechanical Engineering Electrical Engineering Electronics and Communication or any closely related discipline with an outstanding GPA / final grade. A strong background in mathematics, physics, chemistry, mechanics, electronics, and materials science is required..
English proficiency test requirements vary -- a GCQ360 counsellor can confirm the exact score needed for this program.
No, this program does not require a GRE or GMAT score for admission.
Available intakes include: .
This specific program does not list a dedicated scholarship, but GCQ360 can help you explore other funding and scholarship options at University of Freiburg.
This program is offered in Full-time mode, taught in English at the Freiburg im Breisgau campus.
This program has no minimum work experience requirement. No thesis is required to graduate.
Yes -- a GCQ360 counsellor can guide you through eligibility checks, documentation, and the application process for Master of Science in Microsystems Engineering at University of Freiburg, Freiburg im Breisgau, Germany.
